Design of micro-positioning stage with flexure hinge

A micro-positioning stage driven by apiezoelectric ceramic is developed,which adopts a bridge-type flexure hinge mechanism to realize displacement amplification and uses a parallel board hinge mechanism to guide.Based on elastic mechanics and material mechanics,the theoretical models of bridge-type flexure hinge and parallel board hinge mechanisms are established and the driving force, output displacement,stiffness and natural frequency of the stage are analyzed.The Matlab software is used to optimize the geometric parameters,including the length and thickness of the bridge-type flexure hinge,and those of the parallel board hinge,By which the optimized parameters are obtained.The micro-positioning stage after optimization is simulated by Finite Element Analysis(FEA)and a test system is constructed to measure the micro-positioning stage.The experimental results show that the largest error between theoretical analysis and experimental result is 9.8%,and the largest error between FEA and experimental result is 4.2%,which verifies the accuracy of theoretical analysis andFEA,and achieves the stage design objective in smaller volumes,higher amplification and large displacement outputs.