Semiconductor Equipment Predictive Maintenance Techniques

Predictive maintenance is the focus of research in the maintenance field over the years,the paper is starting from the general point for predictive maintenance,analysis and comparison the strengths and weaknesses of the corrective maintenance,preventive maintenance and predictive maintenance,and lists some semiconductor equipment predictive maintenance measures.Semiconductor equipment production is pipeline operations,any equipment malfunction or failure will bring to the enterprise discontinued,resulting in huge losses.Therefore,we will monitor the key equipment,predict maintenance,elimate the hidden fault,and to avoid major consequences of the disaster.Predictive maintenance is a state-based maintenance,The machine is running,its main site on a regular basis(or continuous) state monitoring and fault diagnosis,determine the status of the equipment which,to predict the future development trend of the equipment status,according to the status of the development trend of the equipment and possible failurmodes,pre-established predictive maintenance programs,to determine the machine to start the repair time,contents,methods,and the necessary technical and material support.Predictive maintenance set equipment condition monitoring,fault diagnosis,failure(status) predicted that maintenance decision.