Determination of 25 Impurities Elements in Pure Hafnium or Hafnium Dioxide by ICP-MS

The method for the determination of the contents of 25 kinds trace impurities elements in pure hafnium or hafnium dioxide,such as Mg,Al,Si,P,Ca,Ti,V,Cr,Mn,Fe,Ni,Co,Cu,Zn,As,Zr,Nb,Mo,Cd,Sn,Sb,Ta,W,Pb and Bi,by inductively coupled plasma mass spectrometry(ICP-MS) was established.Hafnium metal can be directly analyzed after the dissolved by mixed acid in room temperature,while hafnium dioxide should be assisted by microwave digestion before the determination by ICP-MS.The spiked recoveries in the range of 86%—120% was obtained to determine the impurities elements in hafnium or hafnium dioxide according to the established method.The relative standard deviations(RSDs) were less than 5% for calculation of the seven consecutive injections of 10ng/mL standard mixtures.The method is simple and fast with low detection limit,that can meet the need for impurity analysis of 99.99% hafnium or hafnium dioxide.