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Study on Meso-Piezoresistive Type Silicon-Germanium Accelerometer

Tingdun Wen

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Abstract

A high sensitivity silicon-germanium accelerometer based on meso-piezoresistance effect is proposed in this letter,we took Si1-xGex/Si film as core component,and deviced double cantilever beamwith structure piezoresistive silicon-germanium acceleration sensor.The influence of adscititious stress on the sensitivity are analyzed by theoretic analysis and emulational calculation,based on it,we can draw the conclution that sensitivity of piezoresistive silicon-micro acceleration sensor are increased one-number-lever.The perference to the optimization of the stucture is provided.

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What this paper is about

A high sensitivity silicon-germanium accelerometer based on meso-piezoresistance effect is proposed in this letter,we took Si1-xGex/Si film as core component,and deviced double cantilever beamwith structure piezoresistive silicon-germanium acceleration sensor.The influence of adscititious stress on the sensitivity are analyzed by theoretic analysis and emulational calculation,based on it,we can draw the conclution that sensitivity of piezoresistive silicon-micro acceleration sensor are increased one-number-lever.The perference to the optimization of the stucture is provided.

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Available abstract

A high sensitivity silicon-germanium accelerometer based on meso-piezoresistance effect is proposed in this letter,we took Si1-xGex/Si film as core component,and deviced double cantilever beamwith structure piezoresistive silicon-germanium acceleration sensor.The influence of adscititious stress on the sensitivity are analyzed by theoretic analysis and emulational calculation,based on it,we can draw the conclution that sensitivity of piezoresistive silicon-micro acceleration sensor are increased one-number-lever.The perference to the optimization of the stucture is provided.

Key concepts: Piezoresistive effect, Accelerometer, Silicon, Acceleration, Germanium, Sensitivity (control systems), Materials science, Optoelectronics

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