Analysis of Transverse Sensitivity in Eight-beam Piezoresistive Micro-accelerometer

The general piezoresistive silicon micro acceleration instrument structure uses the cantilever beam to add the quality block much the form, This kind of Micro Accelerometer has the very high sensitivity, But it also have the very high crosswise effect. In the article introduces one kind of eight- beam and three axles Micro Accelerometer, through uses the ANSYS software simulation to calculate, Explained the acceleration instrument of this structure has the very small crosswise effect.