Research of a Micro-scale Measurement System Based on Michelson Interferometer

A micro-scale measurement system based on Michelson interferometer is designed.The system can transform the micro scale of the measurement object into the change value of movable holophote,take use of photovoltaic cells to transform light signals into electrical signals.Through signal acquisition,the data were processed by microcontroller and the results were showed by liquid crystal display.The measurement results of standard feeler demonstrate that,the system has the properties of high accuracy,easy operation,fast measurement and so on.