Non-contact On-position Measuring System for the Microscopic Texture of Machined Surface texture

This paper introduces a measuring system applied in an ultraprecision lathe which gives a non-contact detection of ultraprecision machined surface microscopic texture on position. With the integration of a high resolution coaxial interference laser profilometer and ultraprecision turning machine we can unify the process of manufacturing and detecting, and thus the limitation of detecting the surface microscopic texture with removing the workpiece from the lathe is broken through, and the goal of detecting being served to machining is achieved. The principle and structure of the laser profilomter, features of the lathe, operating principle of the measuring system are introduced. According to the test results, when utilizing the air slide guides of the lathe as the worktable of the laser profilometer, the vertical resolution is better than 0 1 nm(RMS), with respect to the form accuracy is also excellent. Why so high resolution is obtained the key factor is attributed to the outstanding linearity and repeatability of the lathe’s air slide guide, and the optical structure of the laser profilometer which guarantees good anti-vibration performance. Even under a disturbance of low frequency(1~2 Hz) the measuring system can carry out the sub-nanometer resolution detection with the assistance of air spring and anti-vibration behavior.