The new advance of foil manganin gauges
Lin Teng
Abstract
Lin Teng
Abstract
Foil manganin sensors were used to measure the dynamic high-pressure which were mainly encapsulated in organic material.Aimed at extending the measurement range of manganin gauges,the manganin sensing elements were encapsulated in inorganic material.Al2O3 thin film were deposited on both sides of manganin fiols.Consequently,the measurement range was extended.According to the dynamic high-pressure test,the new kind of sensor measured 55.32GPa high pressure.The sensor records showed its piezoresistance coefficient of 0.0272 and its lifespan of 2.5μm.
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Foil manganin sensors were used to measure the dynamic high-pressure which were mainly encapsulated in organic material.Aimed at extending the measurement range of manganin gauges,the manganin sensing elements were encapsulated in inorganic material.Al2O3 thin film were deposited on both sides of manganin fiols.Consequently,the measurement range was extended.According to the dynamic high-pressure test,the new kind of sensor measured 55.32GPa high pressure.The sensor records showed its piezoresistance coefficient of 0.0272 and its lifespan of 2.5μm.
Key concepts: Manganin, Materials science, FOIL method, Composite material, Pressure sensor, Measure (data warehouse), Range (aeronautics), Pressure measurement