2000•Journal of Tsinghua University(Science and Technology)Requires access

Thermally actuated membrane micropump

Pang Jiang-tao

Abstract

Micropumps used as actuators of microfluid devices are an important part of micro electro mechanical systems (MEMS). Three main parts of a thermally actuated membrane micropump were analyzed, then the micropump was simulated as whole. Simulation results were presented for the flow rate versus frequency, pressure head and input power. The simulation results show that the micropump has a maximum flow rate at 3.33Hz, the pressure head can rise to 64kPa at zero flow rate and the flow rate increases rapidly with input power because of the buckling effect. The simulation results agree well with experimentally measured flow rates measured as a function of driving frequency and input power.

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Key concepts: Micropump, Volumetric flow rate, Actuator, Materials science, Microelectromechanical systems, Head (geology), Flow (mathematics), Power (physics)