Performance Evaluation of a Micropump with Multiple Pneumatic Actuators Via Coupled Simulations

This paper presents the performance evaluation of a micropump with novel multiple actuators through simulations using coupled fluid-solid analysis. The micropump consists of three nozzle/diffuser vibrating actuators on the sidewalls. These vibrating actuators are used to create pressure difference in the three pump chambers. It is this pressure difference that propels the working fluid. The computational simulation results indicated that pumping frequency and movement of the vibrating actuators highly affected the average flow rate of the micropump. The average flow rate of the micropump increased, reached a maximum value, and decreased with pumping frequency. The micropump operating in a push-pull mode provided a wider pumping frequency but less maximum flow rate when compared to its operation in a peristaltic mode.