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Trend of Photolithography Technology and Its Equipment in 21st Century

Su Xue

Abstract

The limitation of photolithography technology and the trend of 193nm,157nm photolithography technology,SCALPEL,x ray photolithography,and IPL are analyzed in the article.The international brand named photolithography equipmemt and the ready to ship new generation of photolithography equipment are also introduced,and the current status of domestic photolithography equipmemt is briefly mentioned.

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Available abstract

Key concepts: Photolithography, Computational lithography, Computer science, Engineering, Nanotechnology, Manufacturing engineering, Materials science, Resist