Fabrication and sintering substrate of CaAlSi system green tape by tape-casting for LTCC

Using self-fabricated CAS(CaO-Al2O3-SiO2) glass as functional phase,the effects of various organic components on rheological behavior and dispersing stability of tape-casting slurry were investigated.The results show it is optimum that the binary azeotropic solvent and dispersant are 2-butanone-ethanol system and tributyl phosphate,respectively.The viscosity of tape-casting slurry increases with increasing the amount of the binder.As plasticizer contents increase,the slurry viscosity firstly reduces and then increases.The lowest value of the slurry viscosity is obtained while the ζ value(plasticizer:binder) is 0.6.The optimum formula for tape-casting slurry are as follows:100.0 g glass powder,18.0 g binder,3.0 g triethyl phosphate,10.8 g plasticizer and 150.0～170.0 g solvent.The glass-ceramic substrate sintered at 950 ℃ has a high relative density(96%),a low permittivity(6.97) and low dielectric loss(0.3%) at 1 MHz frequency.