A New Type of Linear Piezoelectric Motor Based on Rectangular Actuator

A self-moving linear piezoelectric motor based on two different in-plane bending modes of rectangular actuator has been developed. Firstly, the excitation of working vibration modes and motion mechanism of this kind of motor have been analyzed and discussed. Then, in-plane vibration frequencies of actuator are calculated, new motor and its actuator has been designed, and a motor sample for the new type of linear ultrasonic motor is fabricated, and its performance is evaluated experimentally. The experimental results show that new motor offers identical performance in both directions, the maximum velocity is 458.3 mm/s and the maximum drive force is 2.2 N while excitation frequency is 65.2 kHz and voltage is 380 V.