Research on the Actuator for a Linear Ultrasonic Motor Based on In-plane Bending Modes

A linear ultrasonic motor based on the two different in-plane bending modes of rectangular actuator were presented.The operating principle and the excitation of the working vibration modes for the motor were analyzed and discussed.The dynamical model of the rectangular actuator for the motor was established.Based on the vibration mode analysis,the effect of motor structural parameters on mode frequencies was discussed.It showed that the elastic materials and its height had much more effects on the mode frequency.Consequently,the results from dynamical analysis calculation and those from sweeping experiments showed an agreement,which proved the feasibility of using dynamical analysis methodology in the design for the linear ultrasonic motor using in-plane bending vibration modes.