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Development of Micro-Positioning Platform Driven by PZT for Ultra Precision Machining

Jianguo Yang

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Abstract

A novel micro-positioning table for ultra-machining lathe was developed.The model of the flexure hinge and the platform were set up,and the theory of general mechanics was used to analyze the stiffness of the platform.Meanwhile,the static and the dynamic characteristics of the platform were deduced with the finite elements analysis(FEA) software ANSYS.The feasibility of the theoretic formula and the FEA analysis method was proved by the agreement of the theoretic results with FEA results and the experiment results.

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What this paper is about

A novel micro-positioning table for ultra-machining lathe was developed.The model of the flexure hinge and the platform were set up,and the theory of general mechanics was used to analyze the stiffness of the platform.Meanwhile,the static and the dynamic characteristics of the platform were deduced with the finite elements analysis(FEA) software ANSYS.The feasibility of the theoretic formula and the FEA analysis method was proved by the agreement of the theoretic results with FEA results and the experiment results.

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Available abstract

A novel micro-positioning table for ultra-machining lathe was developed.The model of the flexure hinge and the platform were set up,and the theory of general mechanics was used to analyze the stiffness of the platform.Meanwhile,the static and the dynamic characteristics of the platform were deduced with the finite elements analysis(FEA) software ANSYS.The feasibility of the theoretic formula and the FEA analysis method was proved by the agreement of the theoretic results with FEA results and the experiment results.

Key concepts: Machining, Finite element method, Hinge, Stiffness, Mechanical engineering, Software, Engineering, Structural engineering

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Development of Micro-Positioning Platform Driven by PZT for Ultra Precision Machining — Research Paper | ScholarLens