2008Computer Integrated Manufacturing SystemsRequires access

Dynamic WIP control for semiconductor wafer fabrication

Huai Zhang

Open publisher page 0 citations

Abstract

A Work in Process(WIP)controlling approach was proposed to cope with the complication of wafer fabrication,such as large number of equipments,long cycle time and reentering process flow.Firstly,through simulation experiment,each machine's constraint weight was defined by the sensitivity of the system's performance to the system key index.Then the target cycle time and WIP level was allocated into each process step according to the related machine's constraint weight and machining parameters.Finally,part was dynamically selected to be processed based on the difference between the target and actual WIP level and the upstream/downstream information.A simulation experiment was presented to illustrate the feasibility and effectiveness of this method.

About this research paper

What this paper is about

A Work in Process(WIP)controlling approach was proposed to cope with the complication of wafer fabrication,such as large number of equipments,long cycle time and reentering process flow.Firstly,through simulation experiment,each machine's constraint weight was defined by the sensitivity of the system's performance to the system key index.Then the target cycle time and WIP level was allocated into each process step according to the related machine's constraint weight and machining parameters.Finally,part was dynamically selected to be processed based on the difference between the target and actual WIP level and the upstream/downstream information.A simulation experiment was presented to illustrate the feasibility and effectiveness of this method.

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

A Work in Process(WIP)controlling approach was proposed to cope with the complication of wafer fabrication,such as large number of equipments,long cycle time and reentering process flow.Firstly,through simulation experiment,each machine's constraint weight was defined by the sensitivity of the system's performance to the system key index.Then the target cycle time and WIP level was allocated into each process step according to the related machine's constraint weight and machining parameters.Finally,part was dynamically selected to be processed based on the difference between the target and actual WIP level and the upstream/downstream information.A simulation experiment was presented to illustrate the feasibility and effectiveness of this method.

Key concepts: Semiconductor device fabrication, Wafer fabrication, Wafer, Process (computing), Sensitivity (control systems), Constraint (computer-aided design), Machining, Engineering

Related papers

Back to paper searchBrowse research topicsOriginal source
Dynamic WIP control for semiconductor wafer fabrication — Research Paper | ScholarLens