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2000•Journal of Inorganic MaterialsRequires access

X-ray Photoelectron Spectroscopy Studies of ITO Thin Films

Chen Men

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Abstract

The chemical states of In, Sn and O in Sn-doped In_2O_3 films were investigated byusing X-ray photoelectron spectroscopy. The results indicate that Sn and In respectively exist ina same chemical state for both as-deposited and post-annealed films. Two types of O~2-ions, O_iand O_II, can be distinguished by Gaussian simulation. O_I has a binding energy of 529.90±0.30 eVwhich is in oxygen sufficient region, and O_II has a binding energy of 531.40±0.2 eV which is inoxygen deficient regions. Oxygen deficient regions mainly exist in the surface layer.

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What this paper is about

The chemical states of In, Sn and O in Sn-doped In_2O_3 films were investigated byusing X-ray photoelectron spectroscopy. The results indicate that Sn and In respectively exist ina same chemical state for both as-deposited and post-annealed films. Two types of O~2-ions, O_iand O_II, can be distinguished by Gaussian simulation. O_I has a binding energy of 529.90±0.30 eVwhich is in oxygen sufficient region, and O_II has a binding energy of 531.40±0.2 eV which is inoxygen deficient regions. Oxygen deficient regions mainly exist in the surface layer.

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Available abstract

The chemical states of In, Sn and O in Sn-doped In_2O_3 films were investigated byusing X-ray photoelectron spectroscopy. The results indicate that Sn and In respectively exist ina same chemical state for both as-deposited and post-annealed films. Two types of O~2-ions, O_iand O_II, can be distinguished by Gaussian simulation. O_I has a binding energy of 529.90±0.30 eVwhich is in oxygen sufficient region, and O_II has a binding energy of 531.40±0.2 eV which is inoxygen deficient regions. Oxygen deficient regions mainly exist in the surface layer.

Key concepts: X-ray photoelectron spectroscopy, Binding energy, Chemical state, Materials science, Analytical Chemistry (journal), Spectroscopy, Oxygen, Doping

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