Effect of electron beam irradiation on F-doped SnO_2 conducting glass

The phase of SnO__2 on F-doped SnO_2 conducting glass was characterized by X-Ray diffraction technique(XRD), and the results show that the phases of SnO_2 belong to the tetragonal system and its average diameter is 32.35 nm.The chemical composition was analyzed by X-ray photoelectron spectroscopy(XPS),and the experiment results indicate that the main compositions of the glass surface are Sn and O and the element F has not been found. It is further found out that Sn exists in the same chemical state of Sn~~(4+)for both unirradiated and irradiated samples,that two types of O can be distinguished by Gaussian fitting,which are corresponding to the oxygen sufficient region and the oxygen deficient region respectively,and that the oxygen sufficient region(O__(1s)) decreases with the increase of electron beam irradiation flux.