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Research on the Fabrication of Glass Microlens Array

Wenbo Zhao

Open publisher page 1 citations

Abstract

The fabrication of microlens array based on glass was studied and three factors of glass composition,etching method and mask material that affect the fabrication were introduced.The effects of the three factors were verified by experiments.According to the analysis,microlens array that meet the claims was manufactured by using suitable material and method.This provides proof and method for the fabrication of glass microlens array.

About this research paper

What this paper is about

The fabrication of microlens array based on glass was studied and three factors of glass composition,etching method and mask material that affect the fabrication were introduced.The effects of the three factors were verified by experiments.According to the analysis,microlens array that meet the claims was manufactured by using suitable material and method.This provides proof and method for the fabrication of glass microlens array.

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Available abstract

The fabrication of microlens array based on glass was studied and three factors of glass composition,etching method and mask material that affect the fabrication were introduced.The effects of the three factors were verified by experiments.According to the analysis,microlens array that meet the claims was manufactured by using suitable material and method.This provides proof and method for the fabrication of glass microlens array.

Key concepts: Microlens, Fabrication, Materials science, Etching (microfabrication), Optics, Optoelectronics, Nanotechnology, Lens (geology)

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