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2001•Journal of Sensor Science and TechnologyRequires access

The Fabrication of Microlens Array

Sungwook Moon, Hee-Youn Kim

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Abstract

In this study, we fabricated the microlens array using very simple and economical method which used Si molds made by bulk etching in HNA and spreaded SU-8 on top of the Si mold. And, we developed fabrication conditions for high fill factor microlens array that is in height and in diameter. This microlens array can be used for imaging system like IR detector or projection display. It is expected that it can improve the characteristics of these devices.

About this research paper

What this paper is about

In this study, we fabricated the microlens array using very simple and economical method which used Si molds made by bulk etching in HNA and spreaded SU-8 on top of the Si mold. And, we developed fabrication conditions for high fill factor microlens array that is in height and in diameter. This microlens array can be used for imaging system like IR detector or projection display. It is expected that it can improve the characteristics of these devices.

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Method / approach

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Available abstract

In this study, we fabricated the microlens array using very simple and economical method which used Si molds made by bulk etching in HNA and spreaded SU-8 on top of the Si mold. And, we developed fabrication conditions for high fill factor microlens array that is in height and in diameter. This microlens array can be used for imaging system like IR detector or projection display. It is expected that it can improve the characteristics of these devices.

Key concepts: Microlens, Fabrication, Materials science, Etching (microfabrication), Optoelectronics, Detector, Optics, Mold

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