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2006•Chuangan jishu xuebaoRequires access

Temperature Affect of the Micro Capacitive Pressure Sensor

Huang Zhe-lin

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Abstract

This paper introduces a micro capacitive pressure sensor fabricated by Si-Si fusion bonding technology. The main fabrication process is given. The testing equipment is introduced and analyzed.Some testing experiments are done for the produced capacitive pressure micro sensors. Through analysis of the results, it has been proved that this type of micro sensor has obviously the effect of temperature. In order to achieve relatively high sensitivity and stability, the capacitive pressure sensor should be calibrated.

About this research paper

What this paper is about

This paper introduces a micro capacitive pressure sensor fabricated by Si-Si fusion bonding technology. The main fabrication process is given. The testing equipment is introduced and analyzed.Some testing experiments are done for the produced capacitive pressure micro sensors. Through analysis of the results, it has been proved that this type of micro sensor has obviously the effect of temperature. In order to achieve relatively high sensitivity and stability, the capacitive pressure sensor should be calibrated.

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Available abstract

This paper introduces a micro capacitive pressure sensor fabricated by Si-Si fusion bonding technology. The main fabrication process is given. The testing equipment is introduced and analyzed.Some testing experiments are done for the produced capacitive pressure micro sensors. Through analysis of the results, it has been proved that this type of micro sensor has obviously the effect of temperature. In order to achieve relatively high sensitivity and stability, the capacitive pressure sensor should be calibrated.

Key concepts: Capacitive sensing, Pressure sensor, Materials science, Fabrication, Sensitivity (control systems), Hydrostatic test, Electrical engineering, Electronic engineering

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