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Research development on fabrication technology of silicon-based UMBIRFPA abroad

Cheng Kai-fu

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Abstract

This paper describes typical structure and fabrication technology of uncooled micro-bolometer infrared focal plane arrays (UMBIRFPA) being researched abroad.The performance para meters of UMBIRFPA are also given.

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What this paper is about

This paper describes typical structure and fabrication technology of uncooled micro-bolometer infrared focal plane arrays (UMBIRFPA) being researched abroad.The performance para meters of UMBIRFPA are also given.

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Available abstract

This paper describes typical structure and fabrication technology of uncooled micro-bolometer infrared focal plane arrays (UMBIRFPA) being researched abroad.The performance para meters of UMBIRFPA are also given.

Key concepts: Fabrication, Silicon, Materials science, Technology development, Engineering physics, Nanotechnology, Engineering, Optoelectronics

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