Li Shang
Abstract
Uncooled bolometer infrared focal plane arrays with high-performance and low-cost have become research hot spots on infrared thermal imaging. Focal plane arrays are designed in bridge structure. The device is fabricated by means of micromachined process technology. In this paper,the design,fabrication,performance and application of the device are described.
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Uncooled bolometer infrared focal plane arrays with high-performance and low-cost have become research hot spots on infrared thermal imaging. Focal plane arrays are designed in bridge structure. The device is fabricated by means of micromachined process technology. In this paper,the design,fabrication,performance and application of the device are described.
Key concepts: Bolometer, Focal Plane Arrays, Cardinal point, Infrared, Fabrication, Materials science, Optics, Optoelectronics