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Research on design of new Elastomeric film silicon accelerometer chip

Deng Yong-he

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Abstract

This paper introduces the producing technology of newly designed dual-E silicon sensor chip, which produces dual-E sensitive silicon chip and accelerometer sensor with different scale.

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What this paper is about

This paper introduces the producing technology of newly designed dual-E silicon sensor chip, which produces dual-E sensitive silicon chip and accelerometer sensor with different scale.

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Available abstract

This paper introduces the producing technology of newly designed dual-E silicon sensor chip, which produces dual-E sensitive silicon chip and accelerometer sensor with different scale.

Key concepts: Accelerometer, Elastomer, Silicon chip, Chip, Silicon, Materials science, Engineering, Computer science

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