The Design of Flexure Hinge of 6-DOF Micro Table

This paper primarily introduces the design process of bidirectional flexure hinge and universal flexure hinge, which are used as rotational join of 6 degrees of freedom micro table. In order to reasonably design flexure hinge we analyzed the relation between driving force and angle of rotation of flexure hinge according to design requirements, and ascertain the range of flexure hinge stiffness that meets the conditions of driving force. And then we ascertain stiffness and structure size of flexure hinge based on strength condition of flexure hinge, dynamic characteristics of micro table and the relation between rotational stiffness and structure size of flexure hinge. We also analyze the stress distribution when the forces on flexure hinge are maximal by finite element software to ensure correctness of design.