Design and Simulation of Liquid-Filled Variable Bi-Focus Microlens

The variable bi-focus microlens is made up of PDMS main structure including outer-inside membrane and PDMS coverslip including in-out holes. It can be made through UV-lithgraphy and soft-lithgraphy. The deflection of outer-inside membrane under different pressures has been simulated using the ANSYS software. At the same time,the outer-inside focal length,focal length difference and ray tracing,image graph are also simulated by using ZEMAX. The design and simulation will offer the theory to the practice of variable bi-focus microlens,because the microlens' primary optical axis is parallel to the wafer,and makes it easy to integrate with other optical components,which can be usd in many fields,such as detecting of microfluid and optical tweezers.