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2021•Microelectronic EngineeringRequires access

Simulation and optimization of microlens hot-melting fabricating process based on finite element method

Jian Jin, Si Di, Wenyu Lin, Xudi Wang

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Key concepts: Microlens, Finite element method, Process (computing), Materials science, Computer science, Optics, Physics, Thermodynamics

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Simulation and optimization of microlens hot-melting fabricating process based on finite element method — Research Paper | ScholarLens