Yun Zhou, Jian Lv, Baobin Liao, Yadong Jiang
Abstract
针对非制冷红外探测器系统，设计了一种无需衬底温度稳定器——热电制冷器(TEC)的读出电路(ROIC)结构.首先分析了衬底温度对微测辐射热计的特性的影响，利用ROIC对衬底温度变化引起的微测辐射热计的特性的变化进行补偿，实现ROIC的输出信号与衬底无关.该ROIC已在0.5 μm CMOS工艺下成功流片，并应用了到阵列大小为320×240的非制冷微测辐射热计焦平面上.测试结果表明: 在衬底温度变化20 K时，ROIC输出信号仅变化2 mV，实现了去除TEC后衬底温度补偿的功能，有效地降低了系统功耗.该ROIC在低功耗，小体积的非制冷红外探测器上有着广泛的应用.
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针对非制冷红外探测器系统，设计了一种无需衬底温度稳定器——热电制冷器(TEC)的读出电路(ROIC)结构.首先分析了衬底温度对微测辐射热计的特性的影响，利用ROIC对衬底温度变化引起的微测辐射热计的特性的变化进行补偿，实现ROIC的输出信号与衬底无关.该ROIC已在0.5 μm CMOS工艺下成功流片，并应用了到阵列大小为320×240的非制冷微测辐射热计焦平面上.测试结果表明: 在衬底温度变化20 K时，ROIC输出信号仅变化2 mV，实现了去除TEC后衬底温度补偿的功能，有效地降低了系统功耗.该ROIC在低功耗，小体积的非制冷红外探测器上有着广泛的应用.
Key concepts: Microbolometer, Optoelectronics, Materials science, Computer science, TEC, Substrate (aquarium), CMOS, Integrated circuit