Sinter and properties of ZTO ceramic targets with high relative density and low resistivity

ZnO:Ti(ZTO) ceramic targets were prepared by traditional solid-state sintering method.The effects of the TiO2-doped amount and sintering temperature on the microstructure,relative density and electric properties of obtained target were studied.The results show that suitable amount of TiO2 doping can improve growing of the ZTO ceramic grains and homogenizing of the tissue.And an excess TiO2 doping make ZnTi2O4 to separate out from ZTO ceramic.With the increase of TiO2-doped amount,the resistivity of the ceramic target decreases quickly and then increases slowly.When doped x(TiO2) and sintering temperature are 0.5% and 1 350 ℃ respectively,the resistivity(1.480 ?.cm) and relative density(97.7%) are gained for the ceramic targets.And when the sintering temperature is 1 400 ℃,the lowest resistivity(0.305 ?.cm) and higher relative density(97.9%) are gained for the ceramic targets.