Study on Effect of Doping Content on the Performance of ZnO Ceramic Target

High-conductivity ZnO∶Al ceramic targets were fabricated by normal pressure sintering using ZnO and Al2O3 as raw materials.The influence of Al-doped content in ZnO targets on the crystal structures,micro-morphologies and electrical properties were investigated systematically.The results showed that the content of Al2O3 doped in samples was one of the most important impact factors influencing targets' electrical characters.With the increase in atom ratio r of Al to Zn,the resistivity increased first and then decreased.The lowest resistivity of 4.1×10-3 Ω·cm was obtained at r=4.0∶100.It concluded that Zn-Al spinel(ZnAl2O4) which resulted an increase in resistivity would generate when Al-doped volume axceeded a certain value.To obtain ZnO targets with high conductivity,Al-doping amount should be controlled accurately to avoid the formation of ZnAl2O4.