Si-based Microchannel Array with High Length-to-Diameter Ratio and Its Application

Multiplex inductively coupled plasma and electrochemical etchings were used-to-form microchannel array with a high length-to-diameter ratio on Si wafer.The experiment system,principle and method were described,and experimental results were given.Some new phenomena and new problems associated with the technology were investigated.Applications of the microchannel array in 2-dimensional electron multiplier(microchannel plates) were discussed.