Study on preparation and properties of zinc aluminum oxide ceramic targets prepared by sol-gel method

To increase the properties of AZO targets fabricated by normal pressure sintering method,using the sol-gel method prepared Al-ZnO(AZO) nanocomposite powders as raw material,the preparing process parameters were optimized.The results indicate that the wet milling is benefit to the green density uniformity;with the increase of forming pressure,the density of target first increases and then decreases,but the resistivity has the reverse trend;increasing the sintering holding time,the grain size increases,however,the improvements of density and resistivity are not obvious.Using 2 MPa forming pressure,sintering at 1 250 ℃ for 1.0 h,the density of zinc oxide target doped with w(Al)=2% is up to 99.2%,and the resistivity is about 2×10-2 Ω?cm.