2015•The Chinese Journal of Nonferrous MetalsRequires access
Fabrication of ZnO ceramic target by conventional sintering
Sun Wen-ya
Open publisher page 0 citations
Abstract
ZnO ceramic target with the relative density of 98.6% and grain size of 1.35 μm was fabricated by gelcasting and conventional sintering at low temperature. The effects of processing on the relative density, grain growth and electrical resistivity of ZnO ceramic target were studied. The results show that the relative density of ZnO ceramic targets increases with increasing the sintering temperature, and reaches the maximum value at 1050 ℃. The relative density of ZnO ceramic targets increases with increasing the heating rate or duration time. The grain sizes decrease with increasing the heating rate, while increase with increasing the duration time. With increasing the sintering temperature and duration time, the electrical resistivity of ZnO ceramic target reduces. The low electrical resistivity of 1.75×10-2 Ω·cm is achieved at the temperature of 1400 ℃.