2003•Microelectronic TechnologyRequires access

Fabrication of Silicon Tip and its Application

Sun Dao-heng

Abstract

The fabrication of silicon tip and its application in different fields are introduced in the article. The method to fabricate silicon tip is compatible with modern IC technology; in addition, the silicon tip may be easy to sharp, so that it is more practical than other materials. It is believed that the application of silicon tip will be newly developed with the improvement of fabrication technology and other correlative technologies.

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Available abstract

Key concepts: Fabrication, Silicon, Hybrid silicon laser, Materials science, Nanotechnology, Optoelectronics, Medicine, Pathology