Yan Wang
Abstract
The fabrication technology of silicon tip is an important constituent of micro tunneling sensor. Through studying the process of ICP and anisotropic etching associate with bonding technology, ideal silicon tips and suitable process conditions were obtained.
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The fabrication technology of silicon tip is an important constituent of micro tunneling sensor. Through studying the process of ICP and anisotropic etching associate with bonding technology, ideal silicon tips and suitable process conditions were obtained.
Key concepts: Fabrication, Silicon, Etching (microfabrication), Materials science, Nanotechnology, Quantum tunnelling, Ideal (ethics), Optoelectronics