Surface Acoustic Wave Properties and Applications of Lithium Niobate
Xinchang Wang
Abstract
Xinchang Wang
Abstract
LiNbO_3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties. This paper pays emphasis on the piezoelectric, surface acoustic wave properties of LiNbO_3 and fabrication processes of its thin film, with comparison of piezoelectric and surface acoustic wave properties of thin films that have grown in different processes. Finally, several novel applications of LiNbO_3 in the field of surface acoustic wave are introduced briefly.
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LiNbO_3 have many applications in SAW devices due to its excellent piezoelectric and surface acoustic wave properties. This paper pays emphasis on the piezoelectric, surface acoustic wave properties of LiNbO_3 and fabrication processes of its thin film, with comparison of piezoelectric and surface acoustic wave properties of thin films that have grown in different processes. Finally, several novel applications of LiNbO_3 in the field of surface acoustic wave are introduced briefly.
Key concepts: Lithium niobate, Materials science, Surface acoustic wave, Piezoelectricity, Acoustic wave, Fabrication, Acoustics, Surface wave