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2004•Microfabrication TechnologyRequires access

Research of Penetration Length of Near Ultraviolet in SU-8 Layers

Li Xiong, Zhimou Xu, Xinjian Yi, Shaowei He, Sheng Liu, Kun Lian

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Abstract

The transmission spectrum of the SU-8 photoresist in the near UV is analyzed to get the penetration length of the different wavelengths UV in SU-8.The effect on the SU-8 microstructure for the different wavelengths UV is also analyzed.The results show that the pattern exposured by the near UV band of deep penetration has good quality,high aspect ratio and steep sidewall.

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What this paper is about

The transmission spectrum of the SU-8 photoresist in the near UV is analyzed to get the penetration length of the different wavelengths UV in SU-8.The effect on the SU-8 microstructure for the different wavelengths UV is also analyzed.The results show that the pattern exposured by the near UV band of deep penetration has good quality,high aspect ratio and steep sidewall.

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Available abstract

The transmission spectrum of the SU-8 photoresist in the near UV is analyzed to get the penetration length of the different wavelengths UV in SU-8.The effect on the SU-8 microstructure for the different wavelengths UV is also analyzed.The results show that the pattern exposured by the near UV band of deep penetration has good quality,high aspect ratio and steep sidewall.

Key concepts: Photoresist, Penetration (warfare), Wavelength, Penetration depth, Ultraviolet, Materials science, Microstructure, Optics

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