Ferroelectric Films and Ferroelectric Random Access Memory
Zhao Qing-xun
Abstract
Zhao Qing-xun
Abstract
Ferroelectric film and its applications,including the popular methods for ferroelectric film preparation and the techniques for characterizing the structural and physical properties of ferroelectric films and capacitors are reviewed in this paper. Moreover,the conducting barrier layer for integrating ferroelectric films with silicon wafers, coupled with our previous work, has been discussed in details. Finally,some of the challenges for ferroelectric film and its applications have been pointed out.
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Ferroelectric film and its applications,including the popular methods for ferroelectric film preparation and the techniques for characterizing the structural and physical properties of ferroelectric films and capacitors are reviewed in this paper. Moreover,the conducting barrier layer for integrating ferroelectric films with silicon wafers, coupled with our previous work, has been discussed in details. Finally,some of the challenges for ferroelectric film and its applications have been pointed out.
Key concepts: Ferroelectricity, Materials science, Ferroelectric capacitor, Capacitor, Non-volatile memory, Wafer, Layer (electronics), Random access memory