2006•Coal Mine MachineryRequires access

Study on Kinematic Mechanism of Rotary CMP Equipment with Single Head

Yongguang Wang

Abstract

A kinematic model of polishing head in CMP is developed and the kinematic traces of the polishing head are simulated by software Matlab.The effects of variables to polishing traces and quality,such as rotational speed ratio and directions of polishing pad and head,eccentric distance and initial position of polishing are analyzed for providing theoretical guide to design the structure and motion mode of the CMP equipment.

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Available abstract

Key concepts: Polishing, Kinematics, Head (geology), Mechanism (biology), MATLAB, Chemical-mechanical planarization, Engineering, Eccentric