Thickness Dependence of Optoelectric Properties of ZnO∶Zr Films Prepared on Water-Cooled Glass Substrate at Room Temperature

Transparent conducting zirconium-doped zinc oxide films with high transparency and relatively low resistivity have been successfully prepared by radio frequency magnetron sputtering at room temperature.The lowest resistivity achieved is 1.81×10-3 Ω·cm at a thickness of 213 nm.All the films present a high transmittance of above 93.0% in the visible range.The optical band gap decreases from 3.58 eV to 3.50 eV as the thickness increases from 125 nm to 350 nm.