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2003•Optics & Optoelectronic TechnologyRequires access

Research on Dry-Etching Gratings and Wet-Etching Gratings

Sehn Kun

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Abstract

There are two ways in fabricating grating1 one is wet-etching, the other is dry-etching. In this paper, the two methods will be compared in the last ,we have fabrticated 1st order grating usingdry etching.

About this research paper

What this paper is about

There are two ways in fabricating grating1 one is wet-etching, the other is dry-etching. In this paper, the two methods will be compared in the last ,we have fabrticated 1st order grating usingdry etching.

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Available abstract

There are two ways in fabricating grating1 one is wet-etching, the other is dry-etching. In this paper, the two methods will be compared in the last ,we have fabrticated 1st order grating usingdry etching.

Key concepts: Dry etching, Etching (microfabrication), Materials science, Grating, Reactive-ion etching, Optoelectronics, Isotropic etching, Optics

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