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2002•Unpublished venueRequires access

Precise and Feasible Fabrication Process of Microfluidic Devices on a Borosilicate Glass Chip

Yoshinari Sugiyama, Y. Otsu, Takanori Ichiki, Y. Horiike

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Key concepts: Borosilicate glass, Anodic bonding, Fabrication, Materials science, Microfluidics, Etching (microfabrication), Dry etching, Chip

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