Sakae S. INAYOSHI
Abstract
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The gas pressure of a vacuum system is determined by the outgassing from its surfaces. Outgassing can be categorized into desorption, diffusion and permiation. In this text, the mechanisms of these modes, as well as the countermeasures for them, are discussed. Some methods to evaluate the outgassing rate are also introduced.
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The gas pressure of a vacuum system is determined by the outgassing from its surfaces. Outgassing can be categorized into desorption, diffusion and permiation. In this text, the mechanisms of these modes, as well as the countermeasures for them, are discussed. Some methods to evaluate the outgassing rate are also introduced.
Key concepts: Outgassing, Materials science, Diffusion, Desorption, Thermodynamics, Chemistry, Physics, Adsorption