1994Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsRequires access

Thermal outgassing behavior and photoemission studies of Haynes Alloy 214

Pramod K. Sharma, Gregory S. Hickey

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Abstract

Processing of many materials at high temperatures requires a high purity environment. The outgassing from hot surfaces of the processing chamber or the heating elements is a potential problem. The total amount of outgassing as well as the time- and temperature- dependent outgassing rates are important. The outgassing from Haynes Alloy 214 has been studied experimentally under a vacuum in the temperature range from room temperature to 600 °C. In addition to the outgassing rates, the composition of the outgassed species was determined through mass spectrometric analysis. Alloy surface composition was determined by x-ray photoelectron spectroscopy. Changes in surface composition before and after heating can be accounted for by the outgassed species.

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What this paper is about

Processing of many materials at high temperatures requires a high purity environment. The outgassing from hot surfaces of the processing chamber or the heating elements is a potential problem. The total amount of outgassing as well as the time- and temperature- dependent outgassing rates are important. The outgassing from Haynes Alloy 214 has been studied experimentally under a vacuum in the temperature range from room temperature to 600 °C. In addition to the outgassing rates, the composition of the outgassed species was determined through mass spectrometric analysis. Alloy surface composition was determined by x-ray photoelectron spectroscopy. Changes in surface composition before and after heating can be accounted for by the outgassed species.

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Available abstract

Processing of many materials at high temperatures requires a high purity environment. The outgassing from hot surfaces of the processing chamber or the heating elements is a potential problem. The total amount of outgassing as well as the time- and temperature- dependent outgassing rates are important. The outgassing from Haynes Alloy 214 has been studied experimentally under a vacuum in the temperature range from room temperature to 600 °C. In addition to the outgassing rates, the composition of the outgassed species was determined through mass spectrometric analysis. Alloy surface composition was determined by x-ray photoelectron spectroscopy. Changes in surface composition before and after heating can be accounted for by the outgassed species.

Key concepts: Outgassing, X-ray photoelectron spectroscopy, Alloy, Materials science, Analytical Chemistry (journal), Chemistry, Metallurgy, Chemical engineering

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