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Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry

Hood Chatham, Pawan K. Bhat

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Key concepts: Germane, Disilane, Dissociation (chemistry), Silane, Germanium, Chemistry, Analytical Chemistry (journal), Physical chemistry

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Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry — Research Paper | ScholarLens