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FORMATION OF KrF EXCIMER BY TWO PHOTON PROCESS IN KF/F2 MIXTURES

K. Hakuta, Kunihiko Nakayama, Masashi Fujino, Hiroshi Takuma

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Abstract

Since the suggestions of Gudzenko and Yakovienko,l intensive studies for photo-assisted collisions have been carried out experimentally and theoretically for various collision schemes. Previously, we have reported the formations2 of KrF excimer through photo-assisted collision between Kr and F atoms, and also its applications3 to the kinetics of KrF excimer. In the present paper, we report on a new formation process of KrF excimer induced by 248-nm photon in the laser intensity region higher than the previous works.

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What this paper is about

Since the suggestions of Gudzenko and Yakovienko,l intensive studies for photo-assisted collisions have been carried out experimentally and theoretically for various collision schemes. Previously, we have reported the formations2 of KrF excimer through photo-assisted collision between Kr and F atoms, and also its applications3 to the kinetics of KrF excimer. In the present paper, we report on a new formation process of KrF excimer induced by 248-nm photon in the laser intensity region higher than the previous works.

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Available abstract

Since the suggestions of Gudzenko and Yakovienko,l intensive studies for photo-assisted collisions have been carried out experimentally and theoretically for various collision schemes. Previously, we have reported the formations2 of KrF excimer through photo-assisted collision between Kr and F atoms, and also its applications3 to the kinetics of KrF excimer. In the present paper, we report on a new formation process of KrF excimer induced by 248-nm photon in the laser intensity region higher than the previous works.

Key concepts: Excimer, Excimer laser, Materials science, Photon, Process (computing), Kinetics, Atomic physics, Laser

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