1985•The Review of Laser EngineeringOpen access
Design of an Electron Beam Pumped High Power Argon Excimer Laser
Y. Uehara, Etsuo Fujiwara, Shouzaburo KASAI, Kazuki Tsuchida, Wataru Sasaki, Y. Kato, Masanobu Yamanaka, Shouzaburo SAITO, J. Fujita
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Abstract
A procedure for designing an elcctron-beam pumped argon excimer laser is given. Following this procedure, a high power frequency-tunable argon excimer laser has been designed. Experimental data of the argon excimer laser thus designed are compared with our design values. It is proven that the design procedure gives reliable performance prediction. The possibility of high repetition operation of an argon excimer laser is also discussed.
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