1982•Physics of thin filmsRequires access
Plasma-Enhanced Chemical Vapor Deposition of Thin Films
S.M. Ojha
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Abstract
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S.M. Ojha
Abstract
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OpenAlex reports 24 citations for this work. Citation counts describe recorded attention and do not establish research quality.
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Key concepts: Materials science, Chemical vapor deposition, Combustion chemical vapor deposition, Thin film, Chemical engineering, Plasma, Deposition (geology), Carbon film