Ruth Fabiola Balderas‐Valadez, Vivechana Agarwal, Claudia Pacholski
Abstract
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Metal-assisted chemical etching was exploited for fabricating a porous silicon double beam interferometer composed of pillars with large pores on top of a monolayer with smaller pores which can act as a sensing and reference channel, respectively.
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Metal-assisted chemical etching was exploited for fabricating a porous silicon double beam interferometer composed of pillars with large pores on top of a monolayer with smaller pores which can act as a sensing and reference channel, respectively.
Key concepts: Porous silicon, Isotropic etching, Etching (microfabrication), Fabrication, Materials science, Silicon, Monolayer, Nanotechnology