2016•Surface and Coatings TechnologyRequires access

Optimization of chromium nitride (CrNx) interlayers for hydrogenated amorphous carbon (a-C:H) film systems with respect to the corrosion protection properties by high power impulse magnetron sputtering (HiPIMS)

H. Decho, A. Mehner, Hans‐Werner Zoch, H.‐R. Stock

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Key concepts: Materials science, High-power impulse magnetron sputtering, Microstructure, Chromium nitride, Metallurgy, Sputter deposition, Nitride, Sputtering

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Optimization of chromium nitride (CrNx) interlayers for hydrogenated amorphous carbon (a-C:H) film systems with respect to the corrosion protection properties by high power impulse magnetron sputtering (HiPIMS) — Research Paper | ScholarLens